The Institute of Microelectronics of the Chinese Academy of Sciences
Time 2020-06-29 06:04:13Web Name: The Institute of Microelectronics of the Chinese Academy of Sciences
WebSite: http://english.ime.cas.cn
ID:13786
Keywords:
of,Microelectronics,The,Description:
Recently , the scientific research team led by Academician Liu Ming from the Key Laboratory of the Institute of Microelectronics has made progress in the field of HfO2 based ferroelectric memory .Figure a ) Atomic structure of HZO orthorhombic phase . b ) Cross-section of the 3D vertical structure with Fe-diode devices . c ) Typical I-V curve of the TiN/Hf0.5Z0.5rO2 / TiN/W device . （ d ） Voltage dependence of the SET and RESET operation speed for Fe-diode memory .detail...TAGS:of Microelectronics The
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