nanoFAB - Fabrication and Characterization Facility

Web Name: nanoFAB - Fabrication and Characterization Facility

WebSite: http://www.nanofab.ualberta.ca

ID:230566

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Fabrication,nanoFAB,and,Facility,Characterization,

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nanoFAB

Fabrication Characterization Centre

General Info

Founded in 1999, the nanoFAB has grown to become one of the premier micro nanofabrication facilities in Canada.

Who we are How to Gain Access Getting Here Staff Directory Sponsors History Tour RequestsUser Info

Open access facility - available for use by researchers and industry across the country.

Register Centre Access Hours of Operation User Fees Policy Guide Safety InformationServices

High-quality photomask fabrication, characterization services, and process application support.

User Training EBL Service Fee for Service – Characterization/Sample Analysis Fee for Service – Fabrication Mask Fabrication Resale ItemsCapabilities

Full range of fabrication capabilities from CAD design, through deposition, lithography, etch, characterization, and packaging.

Characterization Deposition Etch Lithography Resource Library Our EquipmentNews

Announcements about a range of topics in and around the nanoFAB.

Newsletter Nano Events Featured Articles Facility Notices Career OpportunitiesMultilevel deep etching in silicon

Fabricate designs with multilevel deep etched structures via DRIE

Multi-Ion Beam FIB/SEM is Operational

TEM Sample Preparation and Advanced Ion Milling

Career Opportunities – Avalon Holographics

The nanoFAB is pleased to post the following career opportunity at Avalon Holographics for

Career Opportunities TransEON

The nanoFAB is pleased to post the following career opportunities at Transeon for a

Who We AreWhat We Do

The nanoFAB is a national, open-access training, service, and collaboration centre, focused on academic and industrial applications in micro- and nanoscalefabrication andcharacterization.

Totalling over $84M in specialized equipment and infrastructureOver 200 pieces of equipmentin25 000 sq ft communal laboratory spaceComplete capabilities for microscopy, spectroscopy, material analysis, lithography, thin-film deposition, andetchingAdvanced materials, microscopy, and spectroscopy analysis suiteFabrication for MEMS, sensors, microfluidics, and photonicsFully equipped 4" (100 mm)and 6" (150 mm)processing capabilities

We are an unparalleled Canadian centre supporting research and development in nano sciences and engineering. Our vision is to be the best research centre available to our diverse user community.

Our $84M instruments andcleanroomlaboratoryprovideaccess to a wide variety of capabilities.Ourdedicatedstaffare availablefor training, technical expertise for process development, and analysis support.A competitive fee structure, and no cost initial preliminary tests and runs, ensure all users have the ability to access our capabilities.

Please download and review our Fabrication and Characterization brochure.

nanoFAB NewsMulti-Ion Beam FIB/SEM is Operational
October 8, 2021
TEM Sample Preparation and Advanced Ion MillingAdvanced XPS Capabilities Are Available
August 9, 2021
Imaging, Micro-Probing, Depth Profiling and Heating/Cooling XPSX-Ray Microscopy/nanoCT is Available
August 9, 2021
Non-destructive, high throughput, high resolution 3D imagingnanoFAB Winter 2021 Shutdown Schedule
November 5, 2021
As we approach the end of another year, we would like to share our annualMultilevel deep etching in silicon
October 8, 2021
Fabricate designs with multilevel deep etched structures via DRIERead more news
Current Cleanroom Conditions

Main cleanroom:

19.2°C, 39% RH,PC: 10

10k area:

24.0 °C, 26% RH

New User Registration

nanoFAB Knowledge Base

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Follow @UofA_nanoFABFaculty of EngineeringFind a person at the FacultyExternal RelationsHow to ApplyApps at UAlbertaContact Information

nanoFAB Centre
Edmonton, Alberta
Canada T6G 2V4

Tel: (+1) 780.492.0167

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© 2014 University of Alberta 116 St. and 85 Ave., Edmonton, AB, Canada T6G 2R3

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